特点
- 新型 MEMS 技术突破探针工程限制
- 具有轮廓化形状的长针尖
- 低锥角
- TrueTipView:清晰可见的针尖确保在样品上准确落针
- 垂直侧壁探针芯片,便于操作
应用
- 振荡模式下的形貌成像
- 轻敲模式
- 非接触模式
- 真正非接触TM
- 粗糙度测量
- 高度起伏样品的纳米尺度成像
- 高难度深宽比结构
规格
| Parameter | Unit | Nominal | Range |
|---|---|---|---|
| Frequency | kHz | 300.0 | 200-350 |
| Spring constant | N/m | 40.0 | 24-55 |
| Tip height Ht | µm | 30.0 | 15-50 |
| Tip apex radius | nm | 7.0 | 2-10 |
| Tip side angle θ | ° | 15.0 | +/-0.5° |
| Tip-cantilever angle α | ° | 118.0 | +/-0.5° |
| Cantilever length Lc | µm | 115.0 | +/-1 |
| Cantilever width Wc | µm | 40.0 | +/-1 |
| Cantilever thickness Tc | µm | 3.3 | +/-0.15 |
| Cantilever backside coating | Al | ||
| Tip-side coating | Uncoated | ||
| Tip and cantilever material | p-doped Silicon 0.01-0.02 ohm-cm | ||
| Chip dimensions | mm | 3.4x1.6x0.4 | |
悬臂梁和针尖详情
- 倾斜针尖设计 补偿 AFM 探头的安装角度,确保在各种样品表面上获得准确数据。
- 针尖高度 30 µm 可对更深或难以接近的样品区域进行成像。
- 针尖侧壁角 15° 最大限度减少针尖与样品的卷积效应,从而实现更准确的形貌测量。
- 针尖顶端半径 7 nm 为先进 AFM 应用提供可靠的分辨率。
Technical data
Specifications
| Parameter | Unit | Nominal | Range |
|---|---|---|---|
| Frequency | kHz | 300 | 200-350 |
| Spring constant | N/m | 40 | 24-55 |
| Tip height Ht | µm | 30 | 15-50 |
| Tip apex radius | nm | 7 | 2-10 |
| Tip side angle θ | ° | 15 | ± 0.5 |
| Tip-cantilever angle α | ° | 118 | ± 0.5 |
| Cantilever length Lc | µm | 115 | ± 1 |
| Cantilever width Wc | µm | 40 | ± 1 |
| Cantilever thickness Tc | µm | 3.3 | ± 0.5 |
| Cantilever backside coating | Aluminum | ||
| Tip side coating | Uncoated | ||
| Tip and cantilever material | p-type Silicon 0.01–0.02 Ω·cm | ||
| Chip dimensions | mm | 3.4 × 1.6 × 0.4 | |
Probe geometry
Cantilever & tip details
Tilted tip design
Compensates for the AFM head mounting angle, ensuring accurate data on diverse sample surfaces.
Tip height >30 µm
Enables imaging of deeper or difficult-to-access sample regions.
Half-cone angle <10°
Minimizes tip-sample convolution, ensuring more accurate morphological measurements.
Guaranteed tip radius <10 nm
Provides reliable resolution for advanced AFM applications.