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특징

  • 프로브 엔지니어링의 가능성을 여는 새로운 MEMS 기술
  • 프로파일 형상의 긴 팁
  • 낮은 콘 각도
  • TrueTipView: 정밀한 팁 가시성으로 시료에 정확하게 접근
  • 취급이 쉬운 수직 측벽 프로브 칩

응용 분야

  • 진동 모드의 형상 이미징
    • 태핑 모드
    • 비접촉 모드
    • 트루 비접촉TM
  • 거칠기 측정
  • 굴곡이 큰 시료의 나노스케일 이미징
  • 측정이 어려운 높은 종횡비 구조

LprobeTapping40 Al-Si

Features

  • New MEMS technology unlocking probe engineering
  • Long tip with profiled shape
  • Low cone angle
  • TrueTipView: Precise tip visibility thus accurate landing on sample
  • Vertical sidewalls probe chip for easy handling

Applications

  • Topography imaging in oscillating modes
    • Tapping mode
    • Non-contact mode
    • True non-contactTM
  • Roughness measurements
  • Nanoscale imaging on highly corrugated samples
  • Challenging aspect ratios
220.00 € 220.00 €

QuantityPrice
  • Packaging
Terms and Conditions
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Order code: LT040_Al-Si_30_GB10

사양

3D schematic of Vmicro LT040 Al-Si 30 AFM probe for tapping mode AFM measurements
ParameterUnitNominalRange
FrequencykHz300.0200-350
Spring constantN/m40.024-55
Tip height Htµm30.015-50
Tip apex radiusnm7.02-10
Tip side angle θ°15.0+/-0.5°
Tip-cantilever angle α°118.0+/-0.5°
Cantilever length Lcµm115.0+/-1
Cantilever width Wcµm40.0+/-1
Cantilever thickness Tcµm3.3+/-0.15
Cantilever backside coatingAl
Tip-side coatingUncoated
Tip and cantilever materialp-doped Silicon 0.01-0.02 ohm-cm
Chip dimensionsmm3.4x1.6x0.4

캔틸레버 및 팁 세부 정보

SEM full-view image of Vmicro LT040 Al-Si 30 AFM probe showing complete probe geometry
AFM tip image with two panels: left 30 µm tip profile, right apex zoom (<5 nm).
  • 기울어진 팁 설계 AFM 헤드의 장착 각도를 보정하여 다양한 시료 표면에서 정확한 데이터를 얻을 수 있습니다.
  • 팁 높이 30 µm 깊거나 접근하기 어려운 시료 영역의 이미징이 가능합니다.
  • 팁 측면각 15° 팁과 시료 간 컨볼루션을 최소화하여 형상을 더욱 정확하게 측정합니다.
  • 팁 선단 반경 7 nm 고급 AFM 응용 분야에 신뢰할 수 있는 분해능을 제공합니다.

Technical data

Specifications

3D schematic of Vmicro LT040 Al-Si 30 AFM probe for tapping mode AFM measurements
ParameterUnitNominalRange
FrequencykHz300200-350
Spring constantN/m4024-55
Tip height Htµm3015-50
Tip apex radiusnm72-10
Tip side angle θ°15± 0.5
Tip-cantilever angle α°118± 0.5
Cantilever length Lcµm115± 1
Cantilever width Wcµm40± 1
Cantilever thickness Tcµm3.3± 0.5
Cantilever backside coatingAluminum
Tip side coatingUncoated
Tip and cantilever materialp-type Silicon 0.01–0.02 Ω·cm
Chip dimensionsmm3.4 × 1.6 × 0.4

Probe geometry

Cantilever & tip details

SEM full-view image of Vmicro LT040 Al-Si 30 AFM probe showing complete probe geometry
AFM probe tip profile and apex zoom below 10 nm

Tilted tip design

Compensates for the AFM head mounting angle, ensuring accurate data on diverse sample surfaces.

Tip height >30 µm

Enables imaging of deeper or difficult-to-access sample regions.

Half-cone angle <10°

Minimizes tip-sample convolution, ensuring more accurate morphological measurements.

Guaranteed tip radius <10 nm

Provides reliable resolution for advanced AFM applications.