特點
- 新型 MEMS 技術突破探針工程限制
- 具有輪廓化形狀的長探針
- 低錐角
- TrueTipView:清晰可見的探針確保在樣品上準確落針
- 垂直側壁探針晶片,便於操作
應用
- 振盪模式下的形貌成像
- 輕敲模式
- 非接觸模式
- 真正非接觸TM
- 粗糙度測量
- 高度起伏樣品的奈米尺度成像
- 高難度深寬比結構
規格
| Parameter | Unit | Nominal | Range |
|---|---|---|---|
| Frequency | kHz | 300.0 | 200-350 |
| Spring constant | N/m | 40.0 | 24-55 |
| Tip height Ht | µm | 30.0 | 15-50 |
| Tip apex radius | nm | 7.0 | 2-10 |
| Tip side angle θ | ° | 15.0 | +/-0.5° |
| Tip-cantilever angle α | ° | 118.0 | +/-0.5° |
| Cantilever length Lc | µm | 115.0 | +/-1 |
| Cantilever width Wc | µm | 40.0 | +/-1 |
| Cantilever thickness Tc | µm | 3.3 | +/-0.15 |
| Cantilever backside coating | Al | ||
| Tip-side coating | Uncoated | ||
| Tip and cantilever material | p-doped Silicon 0.01-0.02 ohm-cm | ||
| Chip dimensions | mm | 3.4x1.6x0.4 | |
懸臂樑與探針詳情
- 傾斜探針設計 補償 AFM 探頭的安裝角度,確保在各種樣品表面上獲得準確資料。
- 探針高度 30 µm 可對更深或難以接近的樣品區域進行成像。
- 探針側壁角 15° 最大限度減少探針與樣品的卷積效應,從而實現更準確的形貌測量。
- 探針尖端半徑 7 nm 為先進 AFM 應用提供可靠的解析度。
Technical data
Specifications
| Parameter | Unit | Nominal | Range |
|---|---|---|---|
| Frequency | kHz | 300 | 200-350 |
| Spring constant | N/m | 40 | 24-55 |
| Tip height Ht | µm | 30 | 15-50 |
| Tip apex radius | nm | 7 | 2-10 |
| Tip side angle θ | ° | 15 | ± 0.5 |
| Tip-cantilever angle α | ° | 118 | ± 0.5 |
| Cantilever length Lc | µm | 115 | ± 1 |
| Cantilever width Wc | µm | 40 | ± 1 |
| Cantilever thickness Tc | µm | 3.3 | ± 0.5 |
| Cantilever backside coating | Aluminum | ||
| Tip side coating | Uncoated | ||
| Tip and cantilever material | p-type Silicon 0.01–0.02 Ω·cm | ||
| Chip dimensions | mm | 3.4 × 1.6 × 0.4 | |
Probe geometry
Cantilever & tip details
Tilted tip design
Compensates for the AFM head mounting angle, ensuring accurate data on diverse sample surfaces.
Tip height >30 µm
Enables imaging of deeper or difficult-to-access sample regions.
Half-cone angle <10°
Minimizes tip-sample convolution, ensuring more accurate morphological measurements.
Guaranteed tip radius <10 nm
Provides reliable resolution for advanced AFM applications.