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特點

  • 新型 MEMS 技術突破探針工程限制
  • 具有輪廓化形狀的長探針
  • 低錐角
  • TrueTipView:清晰可見的探針確保在樣品上準確落針
  • 垂直側壁探針晶片,便於操作

應用

  • 振盪模式下的形貌成像
    • 輕敲模式
    • 非接觸模式
    • 真正非接觸TM
  • 粗糙度測量
  • 高度起伏樣品的奈米尺度成像
  • 高難度深寬比結構

LprobeTapping40 Al-Si

Features

  • New MEMS technology unlocking probe engineering
  • Long tip with profiled shape
  • Low cone angle
  • TrueTipView: Precise tip visibility thus accurate landing on sample
  • Vertical sidewalls probe chip for easy handling

Applications

  • Topography imaging in oscillating modes
    • Tapping mode
    • Non-contact mode
    • True non-contactTM
  • Roughness measurements
  • Nanoscale imaging on highly corrugated samples
  • Challenging aspect ratios
220.00 € 220.00 €

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Order code: LT040_Al-Si_30_GB10

規格

3D schematic of Vmicro LT040 Al-Si 30 AFM probe for tapping mode AFM measurements
ParameterUnitNominalRange
FrequencykHz300.0200-350
Spring constantN/m40.024-55
Tip height Htµm30.015-50
Tip apex radiusnm7.02-10
Tip side angle θ°15.0+/-0.5°
Tip-cantilever angle α°118.0+/-0.5°
Cantilever length Lcµm115.0+/-1
Cantilever width Wcµm40.0+/-1
Cantilever thickness Tcµm3.3+/-0.15
Cantilever backside coatingAl
Tip-side coatingUncoated
Tip and cantilever materialp-doped Silicon 0.01-0.02 ohm-cm
Chip dimensionsmm3.4x1.6x0.4

懸臂樑與探針詳情

SEM full-view image of Vmicro LT040 Al-Si 30 AFM probe showing complete probe geometry
AFM tip image with two panels: left 30 µm tip profile, right apex zoom (<5 nm).
  • 傾斜探針設計 補償 AFM 探頭的安裝角度,確保在各種樣品表面上獲得準確資料。
  • 探針高度 30 µm 可對更深或難以接近的樣品區域進行成像。
  • 探針側壁角 15° 最大限度減少探針與樣品的卷積效應,從而實現更準確的形貌測量。
  • 探針尖端半徑 7 nm 為先進 AFM 應用提供可靠的解析度。

Technical data

Specifications

3D schematic of Vmicro LT040 Al-Si 30 AFM probe for tapping mode AFM measurements
ParameterUnitNominalRange
FrequencykHz300200-350
Spring constantN/m4024-55
Tip height Htµm3015-50
Tip apex radiusnm72-10
Tip side angle θ°15± 0.5
Tip-cantilever angle α°118± 0.5
Cantilever length Lcµm115± 1
Cantilever width Wcµm40± 1
Cantilever thickness Tcµm3.3± 0.5
Cantilever backside coatingAluminum
Tip side coatingUncoated
Tip and cantilever materialp-type Silicon 0.01–0.02 Ω·cm
Chip dimensionsmm3.4 × 1.6 × 0.4

Probe geometry

Cantilever & tip details

SEM full-view image of Vmicro LT040 Al-Si 30 AFM probe showing complete probe geometry
AFM probe tip profile and apex zoom below 10 nm

Tilted tip design

Compensates for the AFM head mounting angle, ensuring accurate data on diverse sample surfaces.

Tip height >30 µm

Enables imaging of deeper or difficult-to-access sample regions.

Half-cone angle <10°

Minimizes tip-sample convolution, ensuring more accurate morphological measurements.

Guaranteed tip radius <10 nm

Provides reliable resolution for advanced AFM applications.